Indus Corporation

AWM5000 Series Microbridge Mass Airflow Sensors feature a venturi type flow housing. They measure flow as high as 20 standard liters per minute (SLPM) while inducing a maximum pressure drop of 2.25N H2O. The microbridge chip is in direct contact with the flow stream, greatly reducing error possibilities due to orifice or bypass channel clogging.

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow. Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM and 300 SLPM, with custom flow ranges available